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Phosphoric acid, also known as orthophosphoric acid, is a weak triprotic acid. At 85%, it is a colorless and odorless viscous liquid. Semiconductor grade indicates that the solvent is of sufficient purity for the semiconductor manufacturing and electronic industries, having only trace levels of impurities.
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- Etching of semiconductors
- Sanitizing agent for silicon wafers
- Rust converter
- Anti-rust agent
- Cleaning agent
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Product Information
| CAS | 7664-38-2 |
|---|---|
| Synonyms | Phosphoric acid ORTHOPHOSPHORIC ACID o-Phosphoric acid |
| Assay | 85.00% – 87.00% |
| PubChem ID | 1004 |
| Grade | Semiconductor/Electronic Grade |
| Color | Max 7 |
| Physical form | Liquid |
| Appearance | Colorless |
| Odor | Odorless |
| pH | < 0.5 at 100 g/l at 20 °C (68 °F) |
| Melting point | ca.21 °C (ca.70 °F) |
| Boiling Point | ca.158 °C ca.316 °F at 1,013 hPa |
| Vapor pressure | 2 hPa at 20 °C (68 °F) |
| Density | 1.71 g/cm³ at 20 °C (68 °F) |
| Solubility | Miscible |
| Molecular formula | H3PO4 |
| Molecular weight | 97.995 |
| Arsenic (As) | Max 50 |
| Autoship Available | No |
| Calcium (Ca) | Max 50 |
| Chloride (Cl) | Max 600 |
| Heavy metals | Max 5,000 |
| Insoluble matter | Max 20,000 |
| Iron (Fe) | Max 50 |
| Lead (Pb) | Max 50 |
| Magnesium (Mg) | Max 50 |
| Nitrate (NO3) | Max 1200 |
| Sodium (Na) | Max 60 |
| Sulfate (SO4) | Max 7000 |
| Viscosity | 30.5 mm2/s at 20 °C (68 °F) |













